Umatshini weLithography Mask Aligner Photo-Etching Machine
Intshayelelo yemveliso
Umthombo wokukhanya ovezwayo usebenzisa i-UV LED engenisiweyo kunye nemodyuli yokubumba umthombo wokukhanya, enobushushu obuncinci kunye nozinzo oluhle lomthombo wokukhanya.
Isakhiwo sokukhanyisa esiguquliweyo sinesiphumo esihle sokusasaza ubushushu kunye nesiphumo sokuvala umthombo wokukhanya, kwaye ukutshintshwa kunye nokugcinwa kwesibane se-mercury kulula kwaye kulula. Ixhotyiswe nge-microscope ye-binocular dual field ephezulu kunye ne-LCD yesikrini esibanzi se-intshi ezingama-21, inokulungelelaniswa ngokubonakalayo ngokusebenzisa
isibonisi se-eyepiece okanye i-CCD +, esichanekileyo kakhulu, inkqubo eqondakalayo kunye nokusebenza okulula.
Iimbonakalo
Ngomsebenzi wokucubungula iziqwenga
Ukulinganisa uxinzelelo loqhagamshelwano kuqinisekisa ukuphindaphindeka ngesenzi
Umsantsa wokulungelelaniswa kunye nomsantsa wokuvezwa unokumiselwa ngedijithali
Ukusebenzisa ikhompyutha efakwe ngaphakathi + ukusebenza kwesikrini sokuchukumisa, kulula kwaye kulula, kuhle kwaye kuyaphana
Tsala uhlobo phezulu nasezantsi ipleyiti, ilula kwaye ilula
Xhasa ukuvezwa koqhagamshelwano olungenasikhephe, ukuvezwa koqhagamshelwano oluqinileyo, ukuvezwa koxinzelelo loqhagamshelwano kunye nokuvezwa kokufutshane
Ngomsebenzi we-nano imprint interface
Ukuvezwa komaleko omnye ngesitshixo esinye, inqanaba eliphezulu lokuzenzekela
Lo matshini uthembekile kwaye ubonisa ngokulula, ufanelekile ngakumbi ekufundiseni, kuphando lwesayensi nakwiifektri kwiikholeji nakwiiyunivesithi.
Iinkcukacha ezithe vetshe
Inkcazo
1. Indawo yokuvezwa: 110mm × 110mm ；
2. ★ Ubude bobude bokukhanya: 365nm;
3. Isisombululo: ≤ 1m;
4. Ukuchaneka kokulungelelaniswa: 0.8m;
5. Uluhlu lwentshukumo yetafile yokuskena yenkqubo yokulungelelanisa kufuneka ubuncinane ihlangane: Y: 10mm;
6. Iityhubhu zokukhanya zasekhohlo nasekunene zenkqubo yokulungelelanisa zinokuhamba ngokwahlukeneyo kwiindlela ze-X, y kunye ne-Z, icala le-X: ± 5mm, icala le-Y: ± 5mm kunye necala le-Z: ± 5mm;
7. Ubungakanani bemaski: 2.5 inches, 3 inches, 4 inches, 5 inches;
8. Ubungakanani besampulu: isiqwenga, 2 ", 3", 4 ";
9. ★ Ifanelekile ubukhulu besampulu: 0.5-6mm, kwaye inokuxhasa iziqwenga zesampulu ezingama-20mm ubukhulu (eyenzelwe wena);
10. Imo yokuvezwa: ixesha (imo yokubala ukwehla);
11. Ukukhanya okungafaniyo: ＜ 2.5%;
12. Imakroskopu yokulungelelanisa i-CCD yentsimi ezimbini: ilensi yokusondeza (izihlandlo ezi-1-5) + ilensi yokujonga i-microscope;
13. Ukushukuma kwemaski xa kuthelekiswa nesampuli kufuneka ubuncinane kuhlangane: X: 5mm; Y: 5mm; : 6º；
14. ★ Ubuninzi bamandla okuvezwa: > 30MW / cm2,
15. ★ Indawo yokulungelelanisa kunye nendawo yokuvezwa isebenza kwizitishi ezibini, kwaye iimoto ze-servo zesitishi ezibini zitshintsha ngokuzenzekelayo;
16. Ukulinganisa uxinzelelo loqhagamshelwano kuqinisekisa ukuphindaphindeka ngesensor;
17. ★ Umsantsa wokulungelelaniswa kunye nomsantsa wokuvezwa unokumiselwa ngedijithali;
18. ★ Ine-nano imprint interface kunye ne-proximity interface;
19. ★ Ukusebenza kwesikrini sokuchukumisa;
20. Ubukhulu obupheleleyo: Malunga ne-1400mm (ubude) 900mm (ububanzi) 1500mm (ubude).
