Umatshini weLithography weMask Ulungelelanisa iFoto-Etching Machine
Intshayelelo yemveliso
Umthombo wokukhanya we-exposure wamkela i-UV ye-UV kunye nemodyuli yomthombo wokukhanya wokukhanya, kunye nobushushu obuncinci kunye nokuzinza komthombo wokukhanya.
Isakhiwo sokukhanyisa esiguqulweyo sinesiphumo esihle sokutshatyalaliswa kobushushu kunye nomthombo wokukhanya osondeleyo, kunye nokutshintshwa kwesibane se-mercury kunye nokugcinwa kulula kwaye kulula. Ixhotyiswe ngemakroskopu yentsimi ephindwe kabini yokukhulisa i-binocular kunye ne-21 intshi ebanzi yescreen se-LCD, inokulungelelaniswa ngokubonakalayo
i-eyepiece okanye i-CCD + ibonise, ngokuchaneka okuphezulu kokulungelelaniswa, inkqubo enembile kunye nokusebenza kakuhle.
Iimbonakalo
Ngomsebenzi wokucubungula amaqhekeza
Inqanaba loxinzelelo loqhagamshelwano liqinisekisa ukuphindaphinda ngokusebenzisa inzwa
Umsantsa wokulungelelanisa kunye nomsantsa wokuvezwa unokusetwa ngokwedijithali
Ukusebenzisa ikhompyuter edibeneyo + ukusebenza kwesikrini sokuchukumisa, kulula kwaye kulula, intle kwaye inesisa
Tsala ipleyiti yokutsala phezulu nasezantsi, ilula kwaye ifanelekile
Inkxaso yokuvezwa koqhagamshelwano lwevacuum, ukubakho koqhagamshelwano oluqinileyo, ukuba sesichengeni soqhagamshelwano ngoxinzelelo kunye nokuba sesichengeni sokusondela
Ngomsebenzi we-nano imprint interface
Ukuvezwa komaleko omnye ngesitshixo esinye, iqondo eliphezulu lokuzisebenzela
Lo matshini unokuthembeka okuhle kunye nomboniso olungeleyo, ngakumbi ulungele ukufundisa, uphando lwesayensi kunye neefektri kwiiKholeji kunye neeyunivesithi.
Iinkcukacha ezingakumbi
Inkcazo
1. Indawo ye-Exposure: 110mm × 110mm;
2. ★ Ubungakanani bobutyhileko: 365nm;
3. Isigqibo: ≤ 1m;
4. Ukuchaneka kolungelelwaniso: 0.8m;
5.Uluhlu lwentshukumo lwetheyibhile yokuskena yesixokelelwano solungelelwaniso luya kudibana ubuncinane: Y: 10mm;
6. Iityhubhu zokukhanya ezisekhohlo nasekunene zenkqubo yokulungelelanisa zingahamba ngokwahlukileyo kwi-X, y kunye ne-Z, i-X directional: ± 5mm, i-Y direction: ± 5mm kunye no-Z ulwalathiso: ± 5mm;
7. Ubungakanani bemaski: 2.5 intshi, 3 intshi, 4 intshi, 5 intshi;
8. Ubungakanani besampuli: iqhekeza, 2 ", 3", 4 ";
9. ★ Ifanelekile kwisampulu yobunzima: 0.5-6mm, kwaye inokuxhasa i-20mm isampuli zeqhekeza kakhulu (eyenziwe ngokwezifiso);
10. Imo yokubonakalisa: ixesha (imodi yokubala);
11. Ukungafani kokukhanyisa: ＜ 2.5%;
12. I-Dual field yeCCD yokulungelelanisa i-microscope: i-zoom lens (i-1-5 amaxesha) + i-microscope yenjongo lens;
13. I-stroke yentshukumo ye-mask enxulumene nesampuli iya kudibana ubuncinane: X: 5mm; Y: 5mm; : 6º
14. ★ Ubuninzi bamandla okuvezwa: > 30MW / cm2,
15. ★ Indawo yolungelelwaniso kunye nomsebenzi wokuvezwa kwizikhululo ezibini, kwaye i-servo motor yesikhululo ezibini izitshintsha ngokuzenzekelayo;
16. Uxinzelelo loqhagamshelwano lomgangatho luqinisekisa ukuphindaphinda ngokusebenzisa inzwa;
17. ★ Umsantsa wolungelelwaniso kunye nomsantsa wokuvezwa unokusetwa ngokwedijithali;
18. ★ Ine-nano imprint interface kunye nojongano olusondeleyo;
19. ★ Ukusebenza kwesikrini sokuchukumisa;
20. Umlinganiselo opheleleyo: Malunga ne-1400mm (ubude) 900mm (ububanzi) 1500mm (ubude).
