Umatshini we-Lithography Makhi Aligner Photo-Etching
Intshayelelo Intshayelelo
Umthombo wokukhanya wokukhanya, wamkela i-UV ye-UV yakhokelela kwimodyuli yokukhanya, kunye nemodyuli encinci kunye nobushushu obuncinci kunye nokuzinza okuncinci.
Isakhiwo esingenasikhanyiso sinefuthe lokusebenzela ubushushu kunye nefuthe lokuvala lokukhanya, kunye nokutshintshwa kwe-Mercury kunye nokugcinwa kube lula kwaye kufanelekile. Ixhotywe nge-chinoscope ephezulu ye-binoscope kunye ne-Inchs engama-21 kwi-Inch Screen LCD, inokuhambelana ngokubonakalayo
I-Eyepiece okanye i-CCD + ibonisi, ngokuchaneka okuphezulu, inkqubo enomdla kunye nokusebenza ngokulula.
Iimbonakalo
Ngomsebenzi wokuqhekeka
Ukuqulunqa uxinzelelo lonxibelelwano luqinisekisa ukuphindaphinda ngengeniso
I-Gap yokuHlela kunye nokuveza i-dap inokubekwa ngedijithali
Sebenzisa ikhompyuter yekhompyuter + yokuchukumisa iscreen, elula kwaye ilungele, intle kwaye inesisa
Tsala uhlobo lweplate phezulu, olulula kwaye lulula
Ukuvezwa kwenkxaso vacuum, ukuvezwa nzima ukuvezwa, uxinzelelo lonxibelelwano kunye nokuvezwa kwembonakalo
Kunye ne-Nano ye-Nano
Ukuvezwa kwengoma enye kunye nesitshixo esinye, inqanaba eliphezulu le-automation
Lo matshini unobungqina obulungileyo kunye nemiboniso elula, ngakumbi ilungele ukufundisa, kuphando lwezenzululwazi kunye neefektri kwiikholeji nakwiiyunivesithi
Iinkcukacha ezithe kratya
Ukucaciswa
I-1. I-Accountity Indawo: I-110mm × 110mm;
2.
3. Isisombululo: ≤ 1m;
4. Ukuchaneka kolungelelwaniso: i-0.8m;
5.Uluhlu lwentshukumo yetafile yeskena yenkqubo yolungelelwaniso iya kudibana: Y: 10mm;
6. Iityhubhu zasekhohlo nezingasekunene zenkqubo yolungelelwaniso zinokuhamba ngokwahlukeneyo kwi-X, y kunye ne-Z, i-Na: ± 5mm, i-5mm kunye ne-5mm kunye ne-5mm;
7. Ubungakanani beMask: 2.5 i-intshi, ii-intshi ezi-3, i-intshi ezi-4, i-intshi ezi-5;
8. Ubungakanani besampulu: Isiqwenga, 2 ", 3", 4 ";
9.
I-10. Imowudi yokubonisa: Ixesha (Imowudi yeXene);
11. Ukungafani kokukhanya: <2.5%;
I-12. Indawo yokuhlala i-CCD yolungelelwaniso lwe-microscope: i-zoom lens (amaxesha ama-1-5) + i-microscope yeenjongo;
13. Ukubetha kwentshukumo yemaski ngokuhambelana nesampulu kuya kudibana: x: 5mm; Y: 5mm; : 6º;
14. ★ Ukuvezwa kweMandla :> 30MW / cm2,
15.
16. Ukuqokelela uxinzelelo lonxibelelwano luqinisekisa ukuphindaphinda ngokuphindwa kwesamente;
17.
18.
19.
20. Ubungakanani ngokubanzi: malunga ne-1400mm (ubude) 900mm (ububanzi) 1500mm (ukuphakama).
